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ArticleName The reactor for catalytic hydrogenating of silicon tetrachloride
DOI 10.17580/tsm.2024.01.05
ArticleAuthor Ivanov V. M.

“Germanium and supplements” JSC, Novomoskovsk, Tula Region, Russia

V. M. Ivanov, Foreman, e-mail:


The process of hydrogenation of silicon tetrachloride in the polycrystalline silicon production is actual still. The method of catalytic hydrogenation of silicon tetrachloride to trichlorosilane is perspective for use in the industrial production of polysilicon. Previous work on various aspects of the problem is presented. Performed works was carried out in boundaries of laboratory research. The task was set to develop an industrial converter for this process. The granulometric composition of ground silicon, which is used in the hydrogenation process, is presented. The equations of chemical reactions occurring during the process are given. The hydrogenation process is carried out at a temperature of 600 oC and a pressure of 1.1 MPa. Based on the criterion equations, the calculation of the kinetic characteristics of the fluidized bed of ground silicon was performed. The operating speed of the gas-vapor mixture in the reaction part of the converter is determined to be 0.12 m/s. The obtained characteristics were used in calculating the design parameters of the converter for a production capacity of 1000 tons of polysilicon per year. The reaction zone of an industrial converter has an inner diameter of 1.5 m and a height of 10 m. A schematic picture of the converter is shown. The design features of the converter with a cylindrical side-bar are described. The separator is designed for settling particles carried away from the suspended layer. In the gas distributor, the circular arrangement of holes promotes the formation of a fluidized bed. In the converter design, it is advisable to provide louver baffles that improve the characteristics of the fluidized bed. Incoloy 800HT was proposed as a constructive material. The calculation and the proposed design of the converter can be used in the design of equipment for the construction and modernization of polycrystalline silicon production.

keywords Polycrystalline silicon, silicon tetrachloride, trichlorosilane, hydrogenation reaction, ground silicon, fluidized bed, criterion equations, converter

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