Журналы →
Tsvetnye Metally →
2009 →
№12 →
Назад
Назад
| Название | Materials surface modification by law-temperature plasma volume discharge |
| Автор | Spichkin G. L., Chistov E. K., Pshchelko N. S., Syrkov A. G. |
| Информация об авторе | Pshchelko N. S., e-mail: nikolsp@mail.ru |
| Реферат | Potentialities of installation for materials modification in large volumes by lowtemperature plasma discharge are presented. Physical, chemical, technological and ecological problems are discussed. Considerations concerning volume air discharge forming and its characteristics are proposed. Possible mechanisms of lowtemperature plasma volume discharge influence on material structure (surface and volume) are suggested. |
| Ключевые слова | Law-temperature plasma, gas-discharge reactor, electric field intensity, dielectric coverings (barriers), substrate wafer, adhesion, anopatterned layers, thermal treatment, synthesis. |
| Библиографический список | 1. Rayzer Yu. P. Fizika gazovogo razryada. – M. : Nauka, 1987. – 592 p. 2. Velikhov E. P., Kovalev A. S., Rakhimov A. T. Fizicheskie yavleniya v gazorazryadnoy plazme. – M. : Nauka, 1987. – 160 p. 3. Samoylovich V. G., Gibalov V. I., Kozlov K. V. Fizicheskaya khimiya bar'ernogo razryada. – M. : Izd-vo MGU, 1989. – 176 p. 4. Mnatsakanyan A. Kh., Naydis G. V., Solozobov Yu. M. // Teplofizika vysokikh temperatur. 1986. V. 24, № 26. P. 1060-1066. 5. Senichi Masuda // Pure & Appl. Chem. 1988. Vol. 60, N 5. P. 727–731. 6. Smirnov B. M. Otritsatel'nye iony. – M. : Atomizdat, 1978. – 176 p. 7. Mikroelektronnaya apparatura na beskorpusnykh integral'nikh mikroskhemakh. / pod red. I. N. Volzhenina – M. : Radio I svyaz', 1985. – 83 p. 8. Gimpel'son V. D., Rodionov Yu. A. Tonkoplenochnye mikroskhemy dlya priborostroeniya I vichislitel'noy tekhniki. – M., 1976. – 126 p. 9. Pshchelko N. S. // Tsvetnye metally. 2005. № 9. P. 44-50. (Spets. temat. Vyp. “ Nanostrukturirovannye metally i materialy”). |
| Language of full-text | русский |
| Полный текст статьи | Получить |
