Optical emission spectroscopy has been used to increase the reproducibility of titania layers magnetron deposition. The presence of a fiber−optical cable in the spectrometer Avantes allows recording spectra in the immediate proximity of the plasma area, and the silicon CCD 2048 element detector provides for simultaneous and almost instant recording of the entire spectrum with a good resolution over the 350—810 nm range. Plasma emission lines have been identified and used for the control of technological process. Emission intensity has been studied as a function of anode current. Titanium layers were prepared at high currents, following which the TiO layers with a metalic conductivity were deposited at a lower current and TiO₂ with a conductivity of from 10⁻² Ohm·cm at very low currents. As a result of RF magnetron deposition control by titanium emission intensity, the scatter in the resistivity of the titania layers grown under identical conditions decreased significantly.

1. Zaleska, A. Doped-TiO₂: A review / A. Zaleska // Recent Pat. on Eng. - 2008. - V. 2, N 3. - P. 157—164.
2. Li, B. Review of recent progress in solid-state dye-sensitized solar cells / B. Li, L. Wang, B. Kang, P. Wang, Y. Qiu // Solar Energy Mater. Solar Cells. - 2006. - V. 90, N 5. - P. 549—573.
3. Janisch, R. Transition metal-doped TiO₂ and ZnO — present status of the field / R. Janisch, P. Gopal, N. Spaldin // J. Phys: Condensed Matter. - 2005. - V. 17. — P. R657—R672.
4. UV Photodiodes with large active areas // http://www.sglux.de/products_of_sglux_SiC_photodio.22.0.html?&L=1&tx_ttproducts_pi1[cat]=20 TiO2.
5. Sproul, W. D. Control of reactive sputtering processes / W. D. Sproul, D. J. Christie, D. C. Carter // Thin Solid Films. - 2005. - V. 491, N 1–2. - P. 1—17.
6. Tang, J. P—T boundary of PbO₂-type and baddeleyite type high-pressure phases of titanium dioxide / J. Tang, J. Endo // J. Amer. Ceramic Soc. - 1993. - V. 76, N 3. - P. 796—798.
7. Ardakani, H. K. Electrical and optical properties of in situ «hydrogen-reduced» titanium dioxide thin films deposited by pulsed excimer laser ablation / H. K. Ardakani // Thin Solid Films. - 1994. - V. 248, N 2. - P. 234—239.
8. Forro, L. High mobility n-type charge carriers in large single crystals of anatase (TiO₂) / L. Forro, O. Chauvet, D. Emin, L. Zuppiroli, H. Berger, F. Lévy // J. Appl. Phys. - 1994. - V. 75, N 1. - P. 633—635.
9. Hasiguti, R. R. Electrical conductivity below 3 K of slightly reduced oxygen-deficient rutile TiO_2-x / R. R. Hasiguti, E. Yagi // Phys. Rev. B. - 1994. - V. 49, N 11. - P. 7251—7256.
10. Zaydel', A. N. Tablitsy spektral'nykh liniy / A. N. Zaydel', V. K. Prokof'ev, S. M. Rayskiy - M. : Nauka, 1969. - C. 800.
11. Rossnagel, S. M. Optical emission in magnetrons: Nonlinear aspects / S. M. Rossnagel, K. L. Saeger // J. Vac. Sci. and Techn. A. - 1989. - V. 7, N 3. - P. 968—971.
12. Hoffman, D. W. A sputtering wind / D. W. Hoffman // Ibid. - 1985. - V. 3, N 3. - P. 561—566.
13. Rossnagel, S. M. Gas density reduction effects in magnetrons / S. M. Rossnagel // Ibid. - 1988. - V. 6, N 1. - P. 19—24.