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| ArticleName | Materials surface modification by law-temperature plasma volume discharge |
| ArticleAuthor | Spichkin G. L., Chistov E. K., Pshchelko N. S., Syrkov A. G. |
| ArticleAuthorData | Pshchelko N. S., e-mail: nikolsp@mail.ru |
| Abstract | Potentialities of installation for materials modification in large volumes by lowtemperature plasma discharge are presented. Physical, chemical, technological and ecological problems are discussed. Considerations concerning volume air discharge forming and its characteristics are proposed. Possible mechanisms of lowtemperature plasma volume discharge influence on material structure (surface and volume) are suggested. |
| keywords | Law-temperature plasma, gas-discharge reactor, electric field intensity, dielectric coverings (barriers), substrate wafer, adhesion, anopatterned layers, thermal treatment, synthesis. |
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| Language of full-text | russian |
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